CLEVER
RC Extractor for Realistic 3D Structures
CLEVER is a 3D physics-based RC extractor that uses GDSII mask data and process information to create a realistic 3D structure using its built-in 3D etch/deposit processor and optolithographical simulator. CLEVER back annotates extracted RCs into SPICE netlist.
Key Features
- A must have tool for deep submicron CMOS, MEMS, TFT, and Memory technologies
- True 3D field solver with realistic 3D process offers the highest interconnect RC extraction accuracy and fast feedback to process and layout modifications
- Only RC extractor in the industry capable of reproducing the lithographic effects of Optical Proximity Correction (OPC) sub wavelengths effects, phase-shifts mask (PSM), misalignment, defocus , and DCD
- Direct linking of semiconductor process information to IC layout parasitic extraction without the loss of accuracy which results from curve-fitting parasitic data to empirical formulas
- User selectable boundary conditions, material names and properties
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Rev. 110507_22

More about CLEVER:
Interconnect Manuals
Competitive Summary (PDF)
Product Roadmap
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